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Ken Shirriff さんのコメント...

John D: It's hard to distinguish M3 and M4 due to their 3-D nature. M1 and M2 are planarized (polished flat), but I think M3 is not. The result is that you end up with a slope where M4 goes over M3; this reflects the light away so it looks like a black line around M3, which makes it look like M3 is on top. This is very annoying when I interpret the photos as it isn't obvious which is M3 and which is M4. I have to figure it out by studying the via patterns (M3/M4 vias are bigger than M2/M3 vias), which layer it connects to (if it connects to M2 it must be M3), and how it looks after dissolving some of the metal away.

2024/07/09 5:11:16


Standard cells: Looking at individual gates in the Pentium processor への投稿

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