KR101031226B1 - Heater Block of Rapid Heat Treatment Device - Google Patents

Heater Block of Rapid Heat Treatment Device Download PDF

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KR101031226B1
KR101031226B1 KR1020090077425A KR20090077425A KR101031226B1 KR 101031226 B1 KR101031226 B1 KR 101031226B1 KR 1020090077425 A KR1020090077425 A KR 1020090077425A KR 20090077425 A KR20090077425 A KR 20090077425A KR 101031226 B1 KR101031226 B1 KR 101031226B1
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heating
heater block
heat treatment
heating lamps
lamps
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KR20110019840A (en
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김창교
기태종
김철수
김기남
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에이피시스템 주식회사
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Priority to KR1020090077425A priority Critical patent/KR101031226B1/en
Priority to PCT/KR2010/005119 priority patent/WO2011021796A2/en
Priority to CN201080040511.6A priority patent/CN102484896B/en
Priority to US13/391,410 priority patent/US8913884B2/en
Priority to TW099127401A priority patent/TWI445435B/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
    • H05B3/744—Lamps as heat source, i.e. heating elements with protective gas envelope, e.g. halogen lamps
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
  • Control Of Resistance Heating (AREA)

Abstract

본 발명은 급속열처리 장치의 히터블록에 관한 것으로서, 구체적으로, 가열램프가 쪽매맞춤 방식으로 치밀하게 배열되는 것을 특징으로 한다. 상기 쪽매맞춤 방식은 가열램프 복수개가 직교 형태로 곧게 라인으로 뻗어나가도록 설치되고 이러한 직교 라인 복수개가 이웃한 것끼리 합치되도록 반복 배열되는 구조를 가질 수 있다. 본 발명에 의하면, 종래에 비하여 램프의 빈 공간(void)에 의한 온도구배를 방지할 수 있을 뿐만 아니라, 가열램프가 치밀하게 배열되기 때문에 열복사 면적에 대한 열 밀도가 증가하여 적은 에너지로 동일한 열처리 효율을 얻을 수 있다. 그리고 섹터할당 온도제어 개념을 도입할 때도 종래에 비하여 독립적으로 제어해야 할 섹터의 면적을 크게 해도 충분히 균일한 온도제어가 가능하기 때문에 온도제어회로가 간단해진다. The present invention relates to a heater block of the rapid heat treatment apparatus, and in particular, the heating lamp is characterized in that the densely arranged in a pacing manner. The page matching method may have a structure in which a plurality of heating lamps are installed to extend in a straight line in an orthogonal form, and the plurality of orthogonal lines are repeatedly arranged so as to coincide with neighboring ones. According to the present invention, not only can the temperature gradient caused by the void of the lamp be prevented, but also the heating lamps are densely arranged, so that the heat density of the heat radiation area is increased, so that the same heat treatment efficiency is achieved with less energy. Can be obtained. In addition, even when the concept of sector allocation temperature control is introduced, the temperature control circuit is simplified because a sufficiently uniform temperature control is possible even if the area of the sector to be controlled independently is increased as compared with the conventional art.

급속열처리, 히터블록, 쪽매맞춤, T형, 가열램프, 온도구배 Rapid Heat Treatment, Heater Block, Matching, T Type, Heating Lamp, Temperature Gradient

Description

급속열처리 장치의 히터블록 {Heater block of rapid thermal processing apparatus}Heater block of rapid thermal processing apparatus

본 발명은 급속열처리장치의 히터블록에 관한 것으로서, 가열램프가 쪽매맞춤 방식으로 배열되는 히터블록에 관한 것이다. The present invention relates to a heater block of a rapid heat treatment apparatus, and more particularly, to a heater block in which heating lamps are arranged in a paging manner.

급속열처리 장치는 가열램프의 적외선을 통하여 기판을 빠른 속도로 가열하여 공정을 진행하는 것이다. 이 때 기판이 골고루 가열되도록 하기 위하여 기판을 수평 회전시키는 등 다양한 방법이 시도되고 있다. 그러나 가열램프의 배열구조에 기인한 문제 때문에 기판이 전체적으로 골고루 가열되지 못하고 미세한 온도구배가 생기는 문제가 발생하고 있다. 이는 기판에 형성되는 소자의 집적화가 증가할수록 소자의 신뢰도 및 생산수율에 바람직하지 않게 작용한다. The rapid heat treatment apparatus is a process of heating a substrate at a high speed through infrared rays of a heating lamp. At this time, various methods have been attempted such as horizontally rotating the substrate so that the substrate is evenly heated. However, due to a problem due to the arrangement of the heating lamp, the substrate is not heated evenly as a whole, and there is a problem of generating a fine temperature gradient. This undesirably affects the reliability and production yield of devices as the integration of devices formed on the substrate increases.

도 1은 종래의 동심원적 가열램프 배열을 설명하기 위한 도면으로서, 히터블록(10)을 밑에서 위쪽으로, 즉 가열대상물인 기판 등과 대면하는 대향면에서 바라본 것이다. 도 1을 참조하면, 히터블록(10)에 복수 개의 가열램프(20)가 설치, 배 열되어 있음을 알 수 있다. 도 2는 도 1의 가열램프(20)가 T형-가열램프(28)일 경우, 이를 설명하기 위한 도면이다. 구분을 위하여 일반적인 가열램프와 T형-가열램프에 대해서 서로 다른 참조번호를 사용하였다. 도 2에 도시된 바와 같이, T형 가열램프(28)는 옆에서 보면 T자형이지만 밑에서 보면 일자 막대모양을 하고 있다. 옆에서 볼 때 위로 돌출된 부분이 히터블록(10)에 꼽혀져서 히터블록에 설치되게 된다. 따라서 도 1에 도시된 바와 같은 히터블록(10)에 T형-가열램프(28)가 꼽힌 후, 히터블록(10)을 밑에서 위로 바라보면 T형-가열램프(28)는 일자 막대모양을 한다. 종래에는 이러한 T형-가열램프(28)가 동심원적 배열을 하도록 히터블록(10)에 설치되었다. 1 is a view for explaining a conventional concentric heating lamp arrangement, it is viewed from the opposite surface facing the heater block 10 from the bottom upwards, that is, the substrate to be heated. Referring to FIG. 1, it can be seen that a plurality of heating lamps 20 are installed and arranged in the heater block 10. FIG. 2 is a diagram for explaining the case where the heating lamp 20 of FIG. 1 is a T-heating lamp 28. For the purpose of differentiation, different reference numbers are used for general heating lamps and T-heating lamps. As shown in FIG. 2, the T-type heating lamp 28 is T-shaped when viewed from the side but has a straight bar shape when viewed from below. When viewed from the side, the protruding portion is attached to the heater block 10 to be installed in the heater block. Therefore, after the T-heating lamp 28 is inserted into the heater block 10 as shown in FIG. 1, the T-heating lamp 28 looks like a straight bar when the heater block 10 is viewed from the bottom up. . In the related art, such a T-heating lamp 28 is installed in the heater block 10 so as to have a concentric arrangement.

그러나 이러한 동심원적 배열을 할 때에는 일점쇄선으로 표시한 바와 같이 직선(21) 및 동심원(22) 형태의 빈 공간이 발생하게 되어 기판(미도시)이 회전하더라도 열중첩구간의 발생과 이러한 열중첩구간 사이의 틈(void)의 존재로 인하여 기판이 전체적으로 균일하게 가열되지 못하여 미세한 온도 구배가 발생하게 된다. However, in such concentric arrangement, as shown by the dashed-dotted line, empty spaces in the form of straight lines 21 and concentric circles 22 are generated, so that even when the substrate (not shown) rotates, the heat overlapping zone and the heat overlapping zone are generated. Due to the presence of voids therebetween, the substrate is not heated uniformly as a whole, resulting in a fine temperature gradient.

도 3은 종래의 다른 형태의 동심원적 가열램프 배열을 설명하기 위한 도면이다. 도 3의 경우에도 직선(21) 및 동심원(22) 형태의 빈 공간이 생기는 것을 피할 수는 없다. 3 is a view for explaining a conventional concentric heating lamp arrangement of another type. In the case of FIG. 3, it is inevitable that empty spaces in the form of straight lines 21 and concentric circles 22 are created.

상술한 바와 같이 종래의 동심원적 가열램프 배열은 램프 배열의 특성상 기판을 수평 회전시키더라도 기판의 온도구배를 피할 수가 없으며, 이러한 온도구배를 없애기 위해서는 히터블록을 섹터로 구분하여 가열램프에 인가되는 전력량을 섹터별로 조절하는 섹터할당 온도제어 개념을 도입해야 하는 등 복잡한 문제가 발생 하게 된다. As described above, in the conventional concentric heating lamp array, the temperature gradient of the substrate cannot be avoided even if the substrate is horizontally rotated due to the characteristics of the lamp array, and in order to eliminate the temperature gradient, the amount of power applied to the heating lamp by dividing the heater block into sectors. Complex problems arise, such as the introduction of the concept of sector allocation temperature control that adjusts sector by sector.

따라서 본 발명이 해결하고자 하는 과제는, 가열램프를 종래의 동심원적으로 배열하는 것에서 탈피하여 새로운 형태로 빈틈없이 배열함으로써 램프 배열에 의하여 발생하는 온도구배를 방지할 수 있는 급속열처리장치의 히터블록을 제공하는 데 있다.Therefore, the problem to be solved by the present invention is a heater block of a rapid heat treatment apparatus that can avoid the temperature gradient caused by the lamp arrangement by arranging the heating lamps in a new form without the conventional concentric arrangement of the heating lamp. To provide.

상기 과제를 달성하기 위한 본 발명에 따른 히터블록은, 가열 대상물을 급속하게 가열하여 공정을 처리하기 위한 가열램프가 복수 개 설치되는 급속열처리 장치에 사용되는 것으로서, 상기 가열 대상물을 대면하는 복수 개의 상기 가열램프들의 대향면이, 상기 가열램프들이 쪽매맞춤 방식으로 치밀하게 배열됨으로써, 틈을 가지지 않는 것을 특징으로 한다.The heater block according to the present invention for achieving the above object is used in a rapid heat treatment apparatus is provided with a plurality of heating lamps for rapidly heating the heating object to process the process, a plurality of the above facing the heating object Opposite surfaces of the heating lamps are characterized in that the heating lamps are arranged closely in a paging manner so that they do not have a gap.

여기서, 상기 가열램프들의 대향면에서 상기 가열램프들의 각각이 일자 막대모양을 가지는 것이 바람직하다.Here, it is preferable that each of the heating lamps has a straight bar shape at the opposite surface of the heating lamps.

또한, 상기 가열램프가 상기 가열 대상물의 반대쪽으로 돌출부분을 가지는 T형-가열램프이어도 좋다.Further, the heating lamp may be a T-heating lamp having a protruding portion opposite to the heating object.

본 발명에서, 상기 쪽매맞춤 방식은 상기 가열램프 복수개가 직교 형태로 곧 게 라인으로 뻗어나가도록 설치되고 상기 라인 복수개가 이웃한 것끼리 합치되도록 반복 배열되도록 할 수 있는데, 이 경우, 앞에 있는 가열램프의 후단의 끝면에 뒤에 있는 가열램프의 선단의 측면이 인접하도록 설치되게 하여도 좋고, 앞에 있는 가열램프의 후단의 측면에 뒤에 있는 가열램프의 선단의 끝면이 인접하도록 설치되게 하여도 좋다.In the present invention, the side-fitting method may be installed so that the plurality of heating lamps extend in a straight line in an orthogonal form and the plurality of lines are repeatedly arranged so as to coincide with the neighboring ones, in this case, the front of the heating lamp The end surface of the rear heating lamp may be provided adjacent to the end surface of the rear end, or the end surface of the rear heating lamp may be adjacent to the rear side of the rear heating lamp.

본 발명에 의하면, 종래에 비하여 램프의 빈공간(void)에 의한 온도구배를 방지할 수 있을 뿐만 아니라, 가열램프가 치밀하게 배열되기 때문에 열복사 면적에 대한 열 밀도가 증가하여 적은 에너지로 동일한 열처리 효율을 얻을 수 있다. 그리고 섹터할당 온도제어 개념을 도입할 때도 종래에 비하여 독립적으로 제어해야 할 섹터의 면적을 크게 해도 충분히 균일한 온도제어가 가능하기 때문에 온도제어회로가 간단해 진다. According to the present invention, not only can the temperature gradient due to the void of the lamp be prevented, but also the heating lamps are densely arranged, so that the heat density of the heat radiation area is increased, so that the same heat treatment efficiency is achieved with less energy. Can be obtained. In addition, even when the concept of sector allocation temperature control is introduced, the temperature control circuit is simplified since the temperature control circuit can be sufficiently uniform even if the area of the sector to be controlled independently is increased.

이하에서, 본 발명의 바람직한 실시예를 첨부한 도면들을 참조하여 상세히 설명한다. 아래의 실시예는 본 발명의 내용을 이해하기 위해 제시된 것일 뿐이며 당 분야에서 통상의 지식을 가진 자라면 본 발명의 기술적 사상 내에서 많은 변형이 가능할 것이다. 따라서 본 발명의 권리범위가 이러한 실시예에 한정되는 것으로 해석돼서는 안 된다. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following examples are only presented to understand the content of the present invention, and those skilled in the art will be capable of many modifications within the technical spirit of the present invention. Therefore, the scope of the present invention should not be construed as being limited to these embodiments.

도 4 및 도 5는 본 발명에 따른 쪽매맞춤형 가열램프 배열을 설명하기 위한 도면들이다. 본 발명은 종래의 동심원 형태의 가열램프 배열을 탈피하여 쪽매맞춤 방식으로 히터블록(10)의 밑면이 빈틈없이 채워지는 것을 특징으로 한다. 4 and 5 are views for explaining a side-mounted heating lamp arrangement according to the present invention. The present invention is characterized in that the bottom surface of the heater block 10 is filled without gaps in a paging manner by removing the conventional concentric heating lamp arrangement.

쪽매맞춤은 평면도형을 겹치지 않으면서 빈틈없이 모으는 것을 말하는데, 본 발명에서는 저면에서 볼 때에, 가열대상물인 기판 등에서 볼 때에 일자 막대모양을 갖는 가열램프(20)를 사용하기 때문에 직사각형을 겹치지 않게 빈틈없이 히터블록(10)의 밑면에 설치하는 것을 말한다. 물론 이러한 쪽매맞춤을 이루기 위해서, 저면에서 본 가열램프의 구조가 반드시 일자 막대모양을 가질 필요는 없지만, 배열의 편의상 본 실시예에서는 일자 막대모양인 것을 선택하였으며, 이러한 구조에는 도 2에서 설명하였던 T-형 가열램프를 사용하는 것이 바람직하다.The page matching refers to collecting the tops without overlapping the planar shapes. In the present invention, when using the heating lamp 20 having a straight bar shape when viewed from the bottom, when viewed from a substrate or the like that is a heating object, the rectangular shapes do not overlap without overlapping. It means to install on the bottom of the heater block (10). Of course, in order to achieve this alignment, the structure of the heating lamp seen from the bottom does not necessarily have a straight bar shape, but for convenience of arrangement, the flat bar shape is selected in this embodiment, and this structure has been described in FIG. It is preferable to use a -type heating lamp.

가열램프(20)는 밑에서 볼 때 직사각형 형태를 하여 두 개의 단(S, F)을 가진다. 본 발명에서 말하는 쪽매맞춤이란 도 5에 도시된 바와 같이 이러한 가열램프(20)가 직교 형태로 곧게 라인으로 뻗어나가도록 설치되며 이러한 직교 라인(25)이 이웃한 것끼리 합치되도록 반복 배열되는 것을 말한다.The heating lamp 20 has a rectangular shape when viewed from below and has two stages (S, F). As shown in FIG. 5, the side fitting means that the heating lamps 20 are installed to extend in a straight line in an orthogonal form, and the orthogonal lines 25 are repeatedly arranged to coincide with neighboring ones.

도 5a는 앞에 있는 가열램프의 후단(F)의 끝면에 뒤에 있는 가열램프의 선단(S)의 측면이 인접하도록 하면서 직교 라인(25)이 형성되는 것을 보여주는 것이고, 도 5b는 앞에 있는 가열램프의 후단(F)의 측면에 뒤에 있는 가열램프의 선단(S)의 끝면이 인접하도록 하면서 직교형 라인이 형성되는 것을 보여주는 것이다.Fig. 5a shows an orthogonal line 25 is formed with the side of the front end of the rear heating lamp F being adjacent to the end surface of the rear heating lamp F in front, and FIG. It shows that the orthogonal line is formed while the end surface of the front end (S) of the heating lamp behind the rear end (F) is adjacent.

도 4는 직교형 라인이 수직으로 배열되는 것을 보여주는 것이고, 도 6은 직교형 라인이 사선으로 배열되는 것을 보여주는 것이다. 4 shows the orthogonal lines arranged vertically, and FIG. 6 shows the orthogonal lines arranged diagonally.

도 4 및 도 6에 도시된 바와 같이 직사각형을 쪽매맞춤 방식으로 배열하면 히터블록(10)의 밑면을 가열램프(20)로 빈 공간 없이 채울 수 있게 된다.As shown in Figure 4 and 6 arranged in a pager alignment way it is possible to fill the bottom surface of the heater block 10 with the heating lamp 20 without empty space.

상기한 바와 같이, 본 발명에 의하면 종래에 비하여 램프의 빈공간(void)에 의한 기판(30)의 온도구배를 방지할 수 있을 뿐만 아니라, 가열램프(20)가 치밀하게 배열되기 때문에 열복사 면적에 대한 열 밀도가 증가하여 적은 에너지로 동일한 열처리 효율을 얻을 수 있다. 그리고 섹터할당 온도제어 개념을 도입할 때도 종래에 비하여 독립적으로 제어해야 할 섹터의 면적을 크게 해도 충분히 균일한 온도제어가 가능하기 때문에 온도제어회로가 간단해 진다. As described above, according to the present invention, not only can the temperature gradient of the substrate 30 be prevented due to the void of the lamp, but also the heating lamp 20 is precisely arranged so that the heat radiation area can be reduced. The thermal density is increased so that the same heat treatment efficiency can be obtained with less energy. In addition, even when the concept of sector allocation temperature control is introduced, the temperature control circuit is simplified since the temperature control circuit can be sufficiently uniform even if the area of the sector to be controlled independently is increased.

도 1은 종래의 동심원적 가열램프 배열을 설명하기 위한 도면;1 is a view for explaining a conventional concentric heating lamp arrangement;

도 2는 도 1의 T형-가열램프(20)를 설명하기 위한 도면;2 is a view for explaining the T-heating lamp 20 of FIG.

도 3은 종래의 다른 형태의 동심원적 가열램프 배열을 설명하기 위한 도면;Figure 3 is a view for explaining another conventional concentric heating lamp arrangement of the form;

도 4 및 도 5는 본 발명의 일예에 따른 쪽매맞춤형 가열램프 배열을 설명하기 위한 도면들;4 and 5 are views for explaining a side-mounted heating lamp arrangement according to an embodiment of the present invention;

도 6은 본 발명의 다른 예에 따른 쪽매맞춤형 가열램프 배열을 설명하기 위한 도면이다. 6 is a view for explaining a side-mounted heating lamp arrangement according to another embodiment of the present invention.

<도면의 주요부분에 대한 참조번호의 설명><Description of reference numbers for the main parts of the drawings>

10: 히터블록 20: 가열램프10: heater block 20: heating lamp

21, 22: 공간(void) 25: 직교 라인21, 22: void 25: orthogonal line

28: T형 가열램프28: T-type heating lamp

Claims (6)

가열 대상물을 급속하게 가열하여 공정을 처리하기 위한 가열램프가 복수 개 설치되는 급속열처리 장치의 히터블록에 있어서,In the heater block of the rapid heat treatment apparatus is provided with a plurality of heating lamps for rapidly heating the object to be heated to process the process, 상기 가열 대상물을 대면하는 복수 개의 상기 가열램프들의 대향면이, 상기 가열램프들이 쪽매맞춤 방식으로 치밀하게 배열됨으로써, 틈을 가지지 않는 것을 특징으로 하는 급속열처리장치의 히터블록.The heater block of the rapid heat treatment apparatus, characterized in that the opposing surfaces of the plurality of heating lamps facing the heating object are not closely spaced because the heating lamps are densely arranged in a paging manner. 제1항에 있어서, 상기 가열램프들의 대향면에서 상기 가열램프들의 각각이 일자 막대모양을 가지는 것을 특징으로 하는 급속열처리장치의 히터블록.The heater block of a rapid heat treatment apparatus according to claim 1, wherein each of the heating lamps has a straight bar shape at an opposite surface of the heating lamps. 제2항에 있어서, 상기 가열램프가 상기 가열 대상물의 반대쪽으로 돌출부분을 가지는 T형-가열램프인 것을 특징으로 하는 급속열처리장치의 히터블록.3. The heater block according to claim 2, wherein the heating lamp is a T-heating lamp having a protruding portion opposite to the heating object. 제2항에 있어서, 상기 쪽매맞춤 방식은 상기 가열램프 복수개가 직교 형태로 곧게 라인으로 뻗어나가도록 설치되고 상기 라인 복수개가 이웃한 것끼리 합치되도록 반복 배열되는 것을 특징으로 하는 급속열처리장치의 히터블록. 3. The heater block of claim 2, wherein the page matching method is installed such that the plurality of heating lamps extends in a straight line in an orthogonal form, and the plurality of line lamps are repeatedly arranged so as to coincide with the neighboring ones. 제4항에 있어서, 상기 가열램프 복수개가 직교 형태로 곧게 라인으로 뻗어나가는 구조가, 앞에 있는 가열램프의 후단의 끝면에 뒤에 있는 가열램프의 선단의 측면이 인접하도록 설치됨으로써 이루어지는 것을 특징으로 하는 급속열처리장치의 히터블록.The method of claim 4, wherein the plurality of heating lamps extends in a straight line in an orthogonal shape, and is formed by adjoining the side surfaces of the rear end of the heating lamps adjacent to the end faces of the rear ends of the front heating lamps. Heater block of heat treatment device. 제4항에 있어서, 상기 가열램프 복수개가 직교 형태로 곧게 라인으로 뻗어나가는 구조가, 앞에 있는 가열램프의 후단의 측면에 뒤에 있는 가열램프의 선단의 끝면이 인접하도록 설치됨으로써 이루어지는 것을 특징으로 하는 급속열처리장치의 히터블록.The method of claim 4, wherein the plurality of heating lamps extends in a straight line in an orthogonal form, and is formed by adjoining the end surfaces of the rear heating lamps adjacent to the side surfaces of the rear heating lamps in front of the heating lamps. Heater block of heat treatment device.
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CN201080040511.6A CN102484896B (en) 2009-08-21 2010-08-04 Heating components of rapid thermal processing equipment
US13/391,410 US8913884B2 (en) 2009-08-21 2010-08-04 Heater block for a rapid thermal processing apparatus
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TWI445435B (en) 2014-07-11
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US8913884B2 (en) 2014-12-16
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